The 35 subdivision industrial technology innovation efficiency in Jiangsu Province is evaluated in terms of efficiency，effectiveness, and returns to scale by using DEA method from2003-2014. The result shows that the general level of innovation efficiency is increasing, especially since 2011. The efficiency brings into correspondence with the returns to scale and the effectiveness is steady. But the 35 subdivision industrial technology innovation efficiency in Jiangsu Province is low with 0.585, which is the result of comprehensive action of the effectiveness(0.723) and returns to scale(0.803). The 35 subdivision industrial technology innovation efficiency in Jiangsu Province has obvious characteristics of the industry, and has an obvious difference.