六甲基二硅氮烷合成研究

以三甲基氯硅烷和氨气为原料,以六甲基二硅氧烷、甲苯混合溶剂合成六甲基二硅氮烷(HMDS)。混合溶剂中六甲基二硅氧烷含量的提高有利于反应收率的提升,实验结果表明HMDS的收率最高可达93.53%,较甲苯为溶剂条件下收率提高了20个百分点。产物精馏分离后HMDS成品含量≥99%,副产物六甲基二硅氧烷含量≥99%。

Study of a Method for Preparing Hexamethyldisilazane

Hexamethyldisilazane was synthesized using chlorotrimethyldisilazane and ammonia gas as basic materials. Hexamethyldisiloxane and toluene were used as the mixed solvent in this study. The yield of hexamethyldisilazane was realated to the amount of hexamethyldisiloxane in the mixed solvent. The highest yield in this research was 93.53% when using pure hexamethyldisiloxane. This was 20 percents higher than the yield using pure toluene as reaction solvent. The mixed hexamethyldisilazane was distilled in the distilled tower. The final product was analyzed using gas chromatography. The purity of hexamethyldisilazane and hexamethyldisiloxane was higher than 99%.