| 微纳米压印技术及应用 |
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| 引用本文： | 陈强.微纳米压印技术及应用[J].中国印刷物资商情,2011(6):1-8. |
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| 作者姓名： | 陈强 |
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| 作者单位： | 北京印刷学院等离子体物理及材料研究室,北京102600 |
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| 摘 要： | 随着社会的发展,印刷技术的应用范围不断扩大,新型印刷技术不断涌现。本文重点讨论微电子工业高速发展衍生出的微纳米压印技术,强调微纳米压印可能在微电子器件制造、有机太阳能电池及高精度传感器制造等方面的应用。对微纳米压印技术的未来技术进展和发展方向进行预测,指出微纳米压印技术存在的问题和研究方向。
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| 关 键 词： | 微纳米压印 热压印 应用 |
Micro/Nano Imprint Technology and Applications |
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| CHEN Qiang.Micro/Nano Imprint Technology and Applications[J].China Printing Materials Market,2011(6):1-8. |
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| Authors: | CHEN Qiang |
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| Institution: | CHEN Qiang (Laboratory of Plasma Physics ＆Materials, Beijing Institute of Graphic Communication, Beijing 102600, China) |
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| Abstract: | With the development of the social, application fields of printing technology are remarkably expending, and the novel printing technologies are emerging. In this paper, micro/nano imprint technologies due to the development of microe- lectronics industry were introduced. Micro/Nano imprint technologies used in microelectronic device fabrication, organic so- lar cells fabrication, high-precision sensors fabrication and so on were emphasized. Additionally, the future applications and orientations of micro/nano imprint technologies were forecasted, and the challenge and solution of micro/nano imprint technologies were also discussed. |
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| Keywords: | Micro/nano imprint Thermal lithography Application |
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