| Abstract: | The main research object is MEMS sensor based onpatent from1997 to 2017,using the patent database of orbit to analyze106 national regions.Then the MEMS sensor priority year, the major research institutions in different stage as well as IPC distributionare analyzed. Results show that the MEMS patents are mainly concentrated in the United States, Japan, Germany and South Korea and other countries.AlthoughChina has the third largest number of MEMS patents in the world, but the patents are poor quality, and the core is less. Through the analysis of MEMS sensor patent, it is helpful for the industry to understand the development status and key enterprises of this technology field, and clarify the development direction of China in MEMS sensor field. |
