| 射频源在刻蚀设备中的应用 |
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| 引用本文： | 赵涛,张琪.射频源在刻蚀设备中的应用[J].价值工程,2013(31):45-46. |
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| 作者姓名： | 赵涛 张琪 |
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| 作者单位： | 西安电力电子技术研究所,西安710061 |
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| 摘 要： | 介绍了射频源的工作原理,以及在刻蚀设备上的应用。通过自动匹配网络实现真空腔体内输出功率的大小。
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| 关 键 词： | 射频源 刻蚀设备 匹配网络 |
Application of RF Source in Etching Equipment |
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| ZHAO Tao;,ZHANG Qi.Application of RF Source in Etching Equipment[J].Value Engineering,2013(31):45-46. |
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| Authors: | ZHAO Tao; ZHANG Qi |
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| Institution: | ZHAO Tao; ZHANG Qi ( Xi＇an Power Electronics Research Institute, Xi＇an 710061, China ) |
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| Abstract: | This paper introduces the working principle of the RF source, and its application in etching equipment. The size of out put power in vacuum chamber is achieved by automatically matching network. |
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| Keywords: | RF source etching equipment matching network |
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