Parylene涂覆技术在天馈系统防护上的应用

针对部分天馈器件结构复杂和腔体尺寸太小无法进行传统镀覆防护的特点，提出了真空气相 沉积派拉纶（Parylene）膜层防护处理方法。采用涂覆硅烷偶联剂、优化涂覆工艺过程解决 了Parylene涂覆层与基体的结合力、Parylene膜层质量等关键技术，通过防护试验和电性能 测试验证了防护方法的有效性和可行性。

Application of Parylene smear technology in protection of antenna-feeder devices

Some antenna-fee der devices have too complicated structure or too tiny narrow path to be protected by traditional plating process. According to above characters,vacuum v apor deposition process for Parylene method is proposed. Silane process is used to improve the adhesion between Parylene film and the b ase. The deposition process is investigated to increase the film quality. The processed chamber has passed the anti-corrosion and EM test.