溶胶-凝胶法制备SiO2/TiO2多层膜的研究

通过对溶胶、热处理温度以及溶胶-凝胶过程中反应和存放的环境温度及湿度等参数的调整,研究了在实验室条件下制备SiO2/TiO2多层膜的方法.已制备出折射率可调的溶胶,所镀制的SiO2薄膜折射率在1.18～1.41之间可调,TiO2薄膜折射率在1.80～2.20之间可调.采用椭偏仪、红外分光光度计、紫外-可见分光光度计等对所制得的多层膜的性能进行了研究,结果表明,实验条件对SiO2/TiO2多层膜的制备非常重要.

Preparation and Study of TiO2-SiO2 Multilayer Film

Under the laboratory condition,methods for the preparation of SiO2/ TiO2 multilayer film were studied,based on parameter adjustments for sol,heat treatment temperature,sol-gel process response and storage environment such as temperature and humidity.Sol with variable refractivity has been prepared,and the refractive index of SiO2 thin films could be adjusted from 1.18 to 1.41,while the refractive index of TiO2 film could be adjusted from 1.80 to 2.20.The multilayer film properties were studied by ellipsometer,infrared spectrophotometer,UV-visible spectrophotometer and so on.Results show that the experiment conditions are very important for the preparation of SiO2/ TiO2 multilayer film.